The Characterization of SiC Hot-Implanted with Ga +

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Periodical:

Materials Science Forum (Volumes 264-268)

Edited by:

G. Pensl, H. Morkoç, B. Monemar and E. Janzén

Pages:

713-716

DOI:

10.4028/www.scientific.net/MSF.264-268.713

Citation:

Y. Tanaka et al., "The Characterization of SiC Hot-Implanted with Ga +", Materials Science Forum, Vols. 264-268, pp. 713-716, 1998

Online since:

February 1998

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$35.00

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