Energy Order Effect of Aluminium Multiple Implantation in 6H-SiC

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Periodical:

Materials Science Forum (Volumes 264-268)

Edited by:

G. Pensl, H. Morkoç, B. Monemar and E. Janzén

Pages:

697-700

DOI:

10.4028/www.scientific.net/MSF.264-268.697

Citation:

L. Ottaviani et al., "Energy Order Effect of Aluminium Multiple Implantation in 6H-SiC", Materials Science Forum, Vols. 264-268, pp. 697-700, 1998

Online since:

February 1998

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$35.00

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