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HomeMaterials Science ForumMaterials Science Forum Vols. 264-268Coimplantation Effects on the Electrical...

Coimplantation Effects on the Electrical Properties of Boron and Aluminium Acceptors in 4H-SiC

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Periodical:

Materials Science Forum (Volumes 264-268)

Pages:

685-688

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.264-268.685

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Online since:

February 1998

Authors:

Hisayoshi Itoh, T. Troffer, Gerhard Pensl

Keywords:

Aluminium Acceptor, Boron Acceptor, C Coimplantation, Ion Implantation, Si Coimplantation Electrical Properties

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© 1998 Trans Tech Publications Ltd. All Rights Reserved

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