Thermal Stability in Vacuum and in Air of Al/Ni/W Based Ohmic Contacts to p-Type SiC
p.1021
p.1021
A UHV Study of Ni/SiC Schottky Barrier and Ohmic Contact Formation
p.1025
p.1025
Fermi Level Pinning and Schottky Barrier Characteristics on Reactively Ion Etched 4H-SiC
p.1029
p.1029
Real-Time Assessment of Overlayer Removal on 4H-SiC Surfaces: Techniques and Relevance to Contact Formation
p.1033
p.1033
Pre-Growth Treatment of 4H-SiC Substrates by Hydrogen Etching at Low Pressure
p.1037
p.1037
SiC In-Situ Pre-Growth Etching: A Thermodynamic Study
p.1041
p.1041
The Effect of In Situ Surface Treatment on the Growth of 3C-SiC Thin Films on 6H-SiC Substrate - An X-ray Triple Crystal Diffractometry and Synchrotron X-ray Topography Study
p.1045
p.1045
Dry Etching and Metallization Schemes in a GaN/SiC Heterojunction Device Process
p.1049
p.1049
Demonstration of Deep (80μm) RIE Etching of SiC for MEMS and MMIC Applications
p.1053
p.1053
Pre-Growth Treatment of 4H-SiC Substrates by Hydrogen Etching at Low Pressure
Abstract:
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Info:
Periodical:
Materials Science Forum (Volumes 338-342)
Pages:
1037-1040
Citation:
Online since:
May 2000
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Сopyright:
© 2000 Trans Tech Publications Ltd. All Rights Reserved
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