SiC In-Situ Pre-Growth Etching: A Thermodynamic Study

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Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

1041-1044

Citation:

E. Neyret et al., "SiC In-Situ Pre-Growth Etching: A Thermodynamic Study", Materials Science Forum, Vols. 338-342, pp. 1041-1044, 2000

Online since:

May 2000

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$38.00

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