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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342SiC In-Situ Pre-Growth Etching: A Thermodynamic...

SiC In-Situ Pre-Growth Etching: A Thermodynamic Study

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

1041-1044

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.1041

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Online since:

May 2000

Authors:

E. Neyret, Lea Di Cioccio, Elisabeth Blanquet, C. Raffy, C. Pudda, Thierry Billon, Jean Camassel

Keywords:

Epitaxy, Etching, Thermodynamic Study

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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