The Effect of In Situ Surface Treatment on the Growth of 3C-SiC Thin Films on 6H-SiC Substrate - An X-ray Triple Crystal Diffractometry and Synchrotron X-ray Topography Study

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Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

1045-1048

DOI:

10.4028/www.scientific.net/MSF.338-342.1045

Citation:

J. Chaudhuri et al., "The Effect of In Situ Surface Treatment on the Growth of 3C-SiC Thin Films on 6H-SiC Substrate - An X-ray Triple Crystal Diffractometry and Synchrotron X-ray Topography Study", Materials Science Forum, Vols. 338-342, pp. 1045-1048, 2000

Online since:

May 2000

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$35.00

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