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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Electrochemical C-V Profiling of P-type 6H-SiC

Electrochemical C-V Profiling of P-type 6H-SiC

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

1061-1064

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.1061

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Online since:

May 2000

Authors:

M. Kayambaki, Konstantinos Zekentes

Keywords:

Doping Profile, Electrolytic Etching, Etch Pit

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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