Demonstration of Deep (80μm) RIE Etching of SiC for MEMS and MMIC Applications

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Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

1053-1056

DOI:

10.4028/www.scientific.net/MSF.338-342.1053

Citation:

D. C. Sheridan et al., "Demonstration of Deep (80μm) RIE Etching of SiC for MEMS and MMIC Applications", Materials Science Forum, Vols. 338-342, pp. 1053-1056, 2000

Online since:

May 2000

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$35.00

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