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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Fabrication of SiC Hydrogen Sensor by...

Fabrication of SiC Hydrogen Sensor by Pd-Implantation

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

1443-1446

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.1443

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Online since:

May 2000

Authors:

C.I. Muntele, D. Ila, E.K. Williams, D.B. Poker, D.K. Hensley, David J. Larkin, Iulia Muntele

Keywords:

Hydrogen Sensor, Ion Implantation

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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