X-ray Characterization of 3 inch Diameter 4H and 6H-SiC Experimental Wafers

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Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

473-476

DOI:

10.4028/www.scientific.net/MSF.338-342.473

Citation:

T.A. Kuhr et al., "X-ray Characterization of 3 inch Diameter 4H and 6H-SiC Experimental Wafers", Materials Science Forum, Vols. 338-342, pp. 473-476, 2000

Online since:

May 2000

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$35.00

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