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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342X-ray Characterization of 3 inch Diameter 4H and...

X-ray Characterization of 3 inch Diameter 4H and 6H-SiC Experimental Wafers

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

473-476

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.473

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Online since:

May 2000

Authors:

T.A. Kuhr, William M. Vetter, Michael Dudley, Marek Skowronski

Keywords:

Dislocation Arrays, High Resolution X-Ray Mapping, X-Ray Topography

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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