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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Structural and Optical Studies of Low-Doped n-6H...

Structural and Optical Studies of Low-Doped n-6H SiC Layers Grown by Vacuum Sublimation

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

509-512

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.509

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Online since:

May 2000

Authors:

N.S. Savkina, Alexander A. Lebedev, Alla S. Tregubova, M.P. Scheglov

Keywords:

Dislocation, Optical Microscopy, Pipes, Scanning Electron Microscope (SEM), Vacuum Sublimation Epitaxy, X-Ray Topography

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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