Defect Characterization in 3C-SiC Films Grown on Thin and Thick Silicon Top Layers of SIMOX

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 338-342)

Edited by:

Calvin H. Carter, Jr., Robert P. Devaty, and Gregory S. Rohrer

Pages:

525-528

DOI:

10.4028/www.scientific.net/MSF.338-342.525

Citation:

M. H. Hong et al., "Defect Characterization in 3C-SiC Films Grown on Thin and Thick Silicon Top Layers of SIMOX", Materials Science Forum, Vols. 338-342, pp. 525-528, 2000

Online since:

May 2000

Export:

Price:

$35.00

In order to see related information, you need to Login.