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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342Defect Characterization in 3C-SiC Films Grown on...

Defect Characterization in 3C-SiC Films Grown on Thin and Thick Silicon Top Layers of SIMOX

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Silicon Carbide and Related Materials - 1999

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Periodical:

Materials Science Forum (Volumes 338-342)

Pages:

525-528

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342.525

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Online since:

May 2000

Authors:

Moon Hi Hong, Juyong Chung, F. Namavar, P. Pirouz

Keywords:

3C-SiC, Chemical Vapor Deposition (CVD), Compliant Substrate, Low Defect Density, Thin SIMOX

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© 2000 Trans Tech Publications Ltd. All Rights Reserved

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