Materials Science Forum Vols. 338-342

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https://doi.org/10.4028/www.scientific.net/MSF.338-342

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Growth Rate Control in SiC-Physical Vapor Transport Method Through Heat Transfer Modeling and Non-Stationary Process Conditions

Authors: Thomas L. Straubinger, Matthias Bickermann, M. Grau, Dieter Hofmann, L. Kadinski, Stephan G. Müller, M. Selder, Peter J. Wellmann, Albrecht Winnacker

Experimental and Theoretical Analysis of the Thermal Conductivity of SiC Powder as Source Material for SiC Bulk Growth

Authors: Stephan G. Müller, J. Fricke, Dieter Hofmann, R. Horn, O. Nilsson, B. Rexer

Seed Surface Preparation for SiC Sublimation Growth

Authors: Bernard Pelissier, Cécile Moulin, Etienne Pernot, Mikhail Anikin, Philippe Grosse, Christian Faure, Bernard Ferrand, M. Couchaud, Gérard Basset, Roland Madar

Single Crystal Growth of 6H-SiC on Saw-Damaged Substrate by Sublimation Method

Authors: Sohei Okada, Taro Nishiguchi, T. Shimizu, Makato Sasaki, S. Oshima, Shigehiro Nishino

Thermal Decomposition Cavities in Physical Vapor Transport Grown SiC

Authors: Edward M. Sanchez, V.D. Heydemann, David Snyder, Gregory S. Rohrer, Marek Skowronski

Initial Stage of Crystallization in the Growth of Silicon Carbide on Substrate with Micropipes

Authors: I.I. Khlebnikov, Dimitri I. Cherednichenko, Yuri I. Khlebnikov, Tangali S. Sudarshan

Nucleation of Dislocations during Physical Vapor Transport Growth of Silicon Carbide

Authors: Edward M. Sanchez, V.D. Heydemann, David Snyder, Gregory S. Rohrer, Marek Skowronski

Plastic Deformation and Residual Stresses in SiC Boules Grown by PVT

Authors: Seoyong Ha, Gregory S. Rohrer, Marek Skowronski, V.D. Heydemann, David Snyder

Digital X-Ray Imaging of SiC PVT Process: Analysis of Crystal Growth and Powder Source Degradation

Authors: Peter J. Wellmann, Matthias Bickermann, Dieter Hofmann, L. Kadinski, M. Selder, Thomas L. Straubinger, Albrecht Winnacker

SiC Single Crystal Growth Rate Measurement by In-Situ Observation using the Transmission X-Ray Technique

Authors: Naoki Oyanagi, Shin Ichi Nishizawa, Tomohisa Kato, Hirotaka Yamaguchi, Kazuo Arai