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HomeMaterials Science ForumMaterials Science Forum Vols. 353-356Structural and Optical Properties of SiC Films...

Structural and Optical Properties of SiC Films Deposited on Si by DC Magnetron Sputtering

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Silicon Carbide and Related Materials 2000

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Periodical:

Materials Science Forum (Volumes 353-356)

Pages:

191-194

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.353-356.191

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Cite this paper

Online since:

January 2001

Authors:

Y.M. Lei, Y.H. Yu, L.L. Cheng, L. Lin, B. Sundaraval, E.Z. Luo, S. Lin, C.X. Ren, W.Y. Cheung, S.P. Wong, J.B. Xu, S.C. Zou, I.H. Wilson

Keywords:

AES, EMT, GA-XRD, IR Reflectance, Reactive DC Sputtering

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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