Selective Deposition of 3C-SiC Epitaxially Grown on SOI Subtrates

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Periodical:

Materials Science Forum (Volumes 353-356)

Edited by:

G. Pensl, D. Stephani and M. Hundhausen

Pages:

175-178

DOI:

10.4028/www.scientific.net/MSF.353-356.175

Citation:

M. Eickhoff et al., "Selective Deposition of 3C-SiC Epitaxially Grown on SOI Subtrates", Materials Science Forum, Vols. 353-356, pp. 175-178, 2001

Online since:

January 2001

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$35.00

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