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HomeMaterials Science ForumMaterials Science Forum Vols. 353-356The Microstructure and Surface Morphology of Thin...

The Microstructure and Surface Morphology of Thin 3C-SiC Films Grown on (100) Si Substrates Using an APCVD-Based Carbonization Process

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Silicon Carbide and Related Materials 2000

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Periodical:

Materials Science Forum (Volumes 353-356)

Pages:

167-170

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.353-356.167

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Online since:

January 2001

Authors:

Chien-Hung Wu, Juyong Chung, Moon Hi Hong, Christian A. Zorman, P. Pirouz, Mehran Mehregany

Keywords:

3C-SiC, APCVD, Carbonization, Silicon

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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