Growth of SiC on Si(100) by Low-Pressure MOVPE

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Periodical:

Materials Science Forum (Volumes 353-356)

Edited by:

G. Pensl, D. Stephani and M. Hundhausen

Pages:

163-166

DOI:

10.4028/www.scientific.net/MSF.353-356.163

Citation:

A. Bakin et al., "Growth of SiC on Si(100) by Low-Pressure MOVPE", Materials Science Forum, Vols. 353-356, pp. 163-166, 2001

Online since:

January 2001

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$35.00

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