How to Grow Unstrained 3C-SiC Heteroepitaxial Layers on Si (100) Substrates

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Periodical:

Materials Science Forum (Volumes 353-356)

Edited by:

G. Pensl, D. Stephani and M. Hundhausen

Pages:

155-158

DOI:

10.4028/www.scientific.net/MSF.353-356.155

Citation:

T. Chassagne et al., "How to Grow Unstrained 3C-SiC Heteroepitaxial Layers on Si (100) Substrates", Materials Science Forum, Vols. 353-356, pp. 155-158, 2001

Online since:

January 2001

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$35.00

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