Characterization of 2 Inch SiC Wafers Made by the Sublimation Method

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Periodical:

Materials Science Forum (Volumes 353-356)

Edited by:

G. Pensl, D. Stephani and M. Hundhausen

Pages:

267-270

DOI:

10.4028/www.scientific.net/MSF.353-356.267

Citation:

M. Sasaki et al., "Characterization of 2 Inch SiC Wafers Made by the Sublimation Method", Materials Science Forum, Vols. 353-356, pp. 267-270, 2001

Online since:

January 2001

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Price:

$35.00

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