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HomeMaterials Science ForumMaterials Science Forum Vols. 353-356Virtual Reactor: A New Tool for SiC Bulk Crystal...

Virtual Reactor: A New Tool for SiC Bulk Crystal Growth Study and Optimization

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Silicon Carbide and Related Materials 2000

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Periodical:

Materials Science Forum (Volumes 353-356)

Pages:

57-60

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.353-356.57

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Online since:

January 2001

Authors:

M.V. Bogdanov, O.V. Bord, A.O. Galyukov, S.Yu. Karpov, A.V. Kulik, S.K. Kochuguev, A.E. Komissarov, D.Kh. Ofengeim, A.M. Serkov, A.V. Tsiryulnikov, I.A. Zhmakin, M.S. Ramm, A.I. Zhmakin, Yuri Makarov

Keywords:

Deposit, Modeling, Sublimation, Virtual Reactor

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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