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HomeMaterials Science ForumMaterials Science Forum Vols. 353-356Investigation of the Structure of 2H-AlN Films on...

Investigation of the Structure of 2H-AlN Films on Si(001) Substrates

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Silicon Carbide and Related Materials 2000

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Periodical:

Materials Science Forum (Volumes 353-356)

Pages:

783-786

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.353-356.783

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Online since:

January 2001

Authors:

J. Jinschek, Ute Kaiser, V. Lebedev, W. Richter

Keywords:

Aluminum Nitride (AlN), Domain Film Structure, Off-Axis Substrate, TEM

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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