Impact of Volume Defects on Gold Gettering in Cz-Si Wafers

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Periodical:

Materials Science Forum (Volumes 38-41)

Edited by:

G. Ferenczi

Pages:

237-242

DOI:

10.4028/www.scientific.net/MSF.38-41.237

Citation:

F.G. Kirscht et al., "Impact of Volume Defects on Gold Gettering in Cz-Si Wafers", Materials Science Forum, Vols. 38-41, pp. 237-242, 1989

Online since:

January 1991

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$35.00

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