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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Surface Control of 4H-SiC MESFETs

Surface Control of 4H-SiC MESFETs

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

1387-1390

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.1387

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Online since:

April 2002

Authors:

Keith P. Hilton, Michael J. Uren, D.G. Hayes, H.K. Johnson, P.J. Wilding

Keywords:

High-Temperature, Instabilities, MESFET, Passivation, Recess Etch, Surface Control

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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