Compatibility of VJFET Technology with MESFET Fabrication and Its Interest for System Integration: Fabrication of 6H and 4H-SiC 110 V Lateral MESFET

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 389-393)

Edited by:

S. Yoshida, S. Nishino, H. Harima and T. Kimoto

Pages:

1403-1406

DOI:

10.4028/www.scientific.net/MSF.389-393.1403

Citation:

D. Tournier et al., "Compatibility of VJFET Technology with MESFET Fabrication and Its Interest for System Integration: Fabrication of 6H and 4H-SiC 110 V Lateral MESFET", Materials Science Forum, Vols. 389-393, pp. 1403-1406, 2002

Online since:

April 2002

Export:

Price:

$35.00

In order to see related information, you need to Login.