Growth of Epitaxial (SiC)x(AlN)1-x Thin Films on 6H-SiC by Ion-Assisted Dual Magnetron Sputter Deposition

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Periodical:

Materials Science Forum (Volumes 389-393)

Edited by:

S. Yoshida, S. Nishino, H. Harima and T. Kimoto

Pages:

1481-1484

DOI:

10.4028/www.scientific.net/MSF.389-393.1481

Citation:

S. Tungasmita et al., "Growth of Epitaxial (SiC)x(AlN)1-x Thin Films on 6H-SiC by Ion-Assisted Dual Magnetron Sputter Deposition", Materials Science Forum, Vols. 389-393, pp. 1481-1484, 2002

Online since:

April 2002

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