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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Growth of Epitaxial (SiC)x(AlN)1-x Thin Films on...

Growth of Epitaxial (SiC)_x(AlN)_1-x Thin Films on 6H-SiC by Ion-Assisted Dual Magnetron Sputter Deposition

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

1481-1484

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.1481

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Online since:

April 2002

Authors:

Sukkaneste Tungasmita, P.O.Å. Persson, T. Seppänen, L. Hultman, Jens Birch

Keywords:

Aluminum Nitride (AlN), Epitaxial, Silicon Carbide (SiC), Sputter, Thin Film

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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