Raman Microprobe Study of Carrier Density Profiles in Modulation-Doped 6H SiC

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Periodical:

Materials Science Forum (Volumes 389-393)

Edited by:

S. Yoshida, S. Nishino, H. Harima and T. Kimoto

Pages:

633-636

Citation:

S. Nakashima et al., "Raman Microprobe Study of Carrier Density Profiles in Modulation-Doped 6H SiC", Materials Science Forum, Vols. 389-393, pp. 633-636, 2002

Online since:

April 2002

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