Spatial Mapping of the Carrier Concentration and Mobility in SiC Wafers by Micro Fourier-Transform Infrared Spectroscopy

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Periodical:

Materials Science Forum (Volumes 389-393)

Edited by:

S. Yoshida, S. Nishino, H. Harima and T. Kimoto

Pages:

621-624

DOI:

10.4028/www.scientific.net/MSF.389-393.621

Citation:

H. Yaguchi et al., "Spatial Mapping of the Carrier Concentration and Mobility in SiC Wafers by Micro Fourier-Transform Infrared Spectroscopy", Materials Science Forum, Vols. 389-393, pp. 621-624, 2002

Online since:

April 2002

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