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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Optical Characterization of Ion-Implanted 4H-SiC

Optical Characterization of Ion-Implanted 4H-SiC

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

647-650

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.647

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Online since:

April 2002

Authors:

Zhe Chuan Feng, Feng Yan, W.Y. Chang, Jian Hui Zhao, Jian Yi Lin

Keywords:

4H-SiC, Al-C Ions, Annealing, Crystallization, FT-IR, Multi-Energy Implantation, Optical Transmission, Photoluminescence (PL), Raman Scattering

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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