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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393Nanoscale Electrical Characterization of 3C-SiC...

Nanoscale Electrical Characterization of 3C-SiC Layers by Conductive Atomic Force Microscopy

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Silicon Carbide and Related Materials 2001

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Periodical:

Materials Science Forum (Volumes 389-393)

Pages:

667-670

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393.667

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Online since:

April 2002

Authors:

Akihiro Yahata, Li Zhang, Takashi Shinohe

Keywords:

3C-SiC, Conductive Atomic Force Microscopy, Twin Boundaries, Undulation

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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