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HomeMaterials Science ForumMaterials Science Forum Vols. 404-407X-Ray Stress Measurements of TiCN Thin Films

X-Ray Stress Measurements of TiCN Thin Films

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Abstract:

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Residual Stresses VI, ECRS6

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Periodical:

Materials Science Forum (Volumes 404-407)

Pages:

677-682

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.404-407.677

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Online since:

August 2002

Authors:

Masahide Gotoh, Takayuki Murotani, Toshihiko Sasaki, Yukio Hirose

Keywords:

Heat Treatment, ODF, Residual Stress, TiCN Films

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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