Thin Film SiC Epitaxy on Si(111) from Acetylene Precursor

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Periodical:

Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

221-224

DOI:

10.4028/www.scientific.net/MSF.433-436.221

Citation:

V. De Renzi et al., "Thin Film SiC Epitaxy on Si(111) from Acetylene Precursor", Materials Science Forum, Vols. 433-436, pp. 221-224, 2003

Online since:

September 2003

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$35.00

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