Characterization of 3C-SiC Films Grown on 4H- and 6H-SiC Substrate Mesas during Step-Free Surface Hetero-Epitaxy

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Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

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213-216

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P. G. Neudeck et al., "Characterization of 3C-SiC Films Grown on 4H- and 6H-SiC Substrate Mesas during Step-Free Surface Hetero-Epitaxy", Materials Science Forum, Vols. 433-436, pp. 213-216, 2003

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September 2003

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