Production of 8-Inch SiC Wafer by Hybridization of Single and Polycrystalline SiC Wafers

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Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

241-246

Citation:

K. Murata et al., "Production of 8-Inch SiC Wafer by Hybridization of Single and Polycrystalline SiC Wafers", Materials Science Forum, Vols. 433-436, pp. 241-246, 2003

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September 2003

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DOI: https://doi.org/10.1007/978-3-642-75048-9_40