Production of 8-Inch SiC Wafer by Hybridization of Single and Polycrystalline SiC Wafers

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Periodical:

Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

241-246

DOI:

10.4028/www.scientific.net/MSF.433-436.241

Citation:

K. Murata et al., "Production of 8-Inch SiC Wafer by Hybridization of Single and Polycrystalline SiC Wafers", Materials Science Forum, Vols. 433-436, pp. 241-246, 2003

Online since:

September 2003

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