Conditions for Micropipe Dissociation by 4H-SiC CVD Growth

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Periodical:

Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

261-264

DOI:

10.4028/www.scientific.net/MSF.433-436.261

Citation:

I. Kamata et al., "Conditions for Micropipe Dissociation by 4H-SiC CVD Growth", Materials Science Forum, Vols. 433-436, pp. 261-264, 2003

Online since:

September 2003

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