Synchrotron White Beam X-Ray Topography and High Resolution Triple Axis X-Ray Diffraction Studies of Defects in SiC Substrates, Epilayers and Devices

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Materials Science Forum (Volumes 433-436)

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Peder Bergman and Erik Janzén

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247-252

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M. Dudley et al., "Synchrotron White Beam X-Ray Topography and High Resolution Triple Axis X-Ray Diffraction Studies of Defects in SiC Substrates, Epilayers and Devices", Materials Science Forum, Vols. 433-436, pp. 247-252, 2003

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September 2003

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