Characteristics of Planar Defects in Shallow Trenches Related to the Presence of Micropipes

Abstract:

Article Preview

Info:

Periodical:

Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

277-280

Citation:

N. Vouroutzis et al., "Characteristics of Planar Defects in Shallow Trenches Related to the Presence of Micropipes", Materials Science Forum, Vols. 433-436, pp. 277-280, 2003

Online since:

September 2003

Export:

Price:

$38.00

[1] N. Vouroutzis, R. Yakimova, M. Syväjärvi, H. Jacobson, J. Stoemenos, and E. Janzén, Mat. Sci. Forum 389-393 (2002), p.395.

DOI: https://doi.org/10.4028/www.scientific.net/msf.389-393.395

[2] I. Kamata, H. Tsuchida, T. Jikimoto and K. Izumi. Jpn. J. Appl. Phys. 39 (2000), p.6496.

[3] M. Syväjärvi, R. Yakimova, M. Tuominen, A. Kakanakova-Georgieva, M.F. MacMillan, A. Henry, Q. Wahab, and E. Janzén, J. Crystal Growth 197 (1999), p.155.

DOI: https://doi.org/10.1016/s0022-0248(98)00890-2

[4] I. Kamata, H. Tsuchida, T. Jikimoto, T. Miyanagi and K. Izumi. This conference paper weP3- O4. Fig. 4. High resolution micrograph from the )0011( type SF. The inset is the lattice image taken from the Fourier transform of the )0011( reflection.

Fetching data from Crossref.
This may take some time to load.