Characteristics of Planar Defects in Shallow Trenches Related to the Presence of Micropipes

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Periodical:

Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

277-280

Citation:

N. Vouroutzis et al., "Characteristics of Planar Defects in Shallow Trenches Related to the Presence of Micropipes", Materials Science Forum, Vols. 433-436, pp. 277-280, 2003

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September 2003

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DOI: https://doi.org/10.4028/www.scientific.net/msf.389-393.395

[2] I. Kamata, H. Tsuchida, T. Jikimoto and K. Izumi. Jpn. J. Appl. Phys. 39 (2000), p.6496.

[3] M. Syväjärvi, R. Yakimova, M. Tuominen, A. Kakanakova-Georgieva, M.F. MacMillan, A. Henry, Q. Wahab, and E. Janzén, J. Crystal Growth 197 (1999), p.155.

DOI: https://doi.org/10.1016/s0022-0248(98)00890-2

[4] I. Kamata, H. Tsuchida, T. Jikimoto, T. Miyanagi and K. Izumi. This conference paper weP3- O4. Fig. 4. High resolution micrograph from the )0011( type SF. The inset is the lattice image taken from the Fourier transform of the )0011( reflection.