Comparative TEM Investigation of MBE and RTCVD Conversion of Si into SiC

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Periodical:

Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

285-288

Citation:

F. M. Morales et al., "Comparative TEM Investigation of MBE and RTCVD Conversion of Si into SiC", Materials Science Forum, Vols. 433-436, pp. 285-288, 2003

Online since:

September 2003

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DOI: https://doi.org/10.1016/s0040-6090(98)01589-2

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