Electrical and Optical Study of 4H-SiC CVD Epitaxial Layers Irradiated with Swift Heavy Ions

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Periodical:

Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

467-470

DOI:

10.4028/www.scientific.net/MSF.433-436.467

Citation:

E. V. Kalinina et al., "Electrical and Optical Study of 4H-SiC CVD Epitaxial Layers Irradiated with Swift Heavy Ions", Materials Science Forum, Vols. 433-436, pp. 467-470, 2003

Online since:

September 2003

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$35.00

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