Electrical and Optical Study of 4H-SiC CVD Epitaxial Layers Irradiated with Swift Heavy Ions

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Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

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467-470

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E. V. Kalinina et al., "Electrical and Optical Study of 4H-SiC CVD Epitaxial Layers Irradiated with Swift Heavy Ions", Materials Science Forum, Vols. 433-436, pp. 467-470, 2003

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September 2003

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