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HomeMaterials Science ForumMaterials Science Forum Vols. 433-436Electrochemical Etching of n-Type 6H-SiC Using...

Electrochemical Etching of n-Type 6H-SiC Using Aqueous KOH Solutions

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Silicon Carbide and Related Materials - 2002

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Periodical:

Materials Science Forum (Volumes 433-436)

Pages:

665-668

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.433-436.665

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Online since:

September 2003

Authors:

Masashi Kato, Masaya Ichimura, Eisuke Arai, P. Ramasamy

Keywords:

6H-SiC, Electrochemical Etching, Etching Rate, KOH Solution, Patterning

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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