Al/Ti Ohmic Contacts to p-Type Ion-Implanted 6H-SiC: Mono- and Two- Dimensional Analysis of TLM Data

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Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

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673-676

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F. Moscatelli et al., "Al/Ti Ohmic Contacts to p-Type Ion-Implanted 6H-SiC: Mono- and Two- Dimensional Analysis of TLM Data", Materials Science Forum, Vols. 433-436, pp. 673-676, 2003

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September 2003

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