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HomeMaterials Science ForumMaterials Science Forum Vols. 433-436SiC Lateral Super-Junction Diodes Fabricated by...

SiC Lateral Super-Junction Diodes Fabricated by Epitaxial Growth

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Silicon Carbide and Related Materials - 2002

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Periodical:

Materials Science Forum (Volumes 433-436)

Pages:

859-862

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.433-436.859

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Online since:

September 2003

Authors:

Mineo Miura, Shun-ichi Nakamura, Jun Suda, Tsunenobu Kimoto, Hiroyuki Matsunami

Keywords:

Chemical Vapor Deposition (CVD), Epitaxial Growth, Super Junction SJ

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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