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HomeMaterials Science ForumMaterials Science Forum Vols. 433-436Properties of AlN Layers Grown by Sublimation...

Properties of AlN Layers Grown by Sublimation Epitaxy

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Silicon Carbide and Related Materials - 2002

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Periodical:

Materials Science Forum (Volumes 433-436)

Pages:

995-998

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.433-436.995

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Online since:

September 2003

Authors:

M. Beshkova, Z. Zakhariev, Jens Birch, A. Kakanakova-Georgieva, Rositza Yakimova

Keywords:

Aluminum Nitride (AlN), Growth Rate, Morpholoy, Sublimation Epitaxy, X-Ray Diffraction (XRD)

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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