Growth and Characterization of Epitaxial Wurtzite Al1-xInxN Thin Films Deposited by UHV Reactive Dual DC Magnetron Sputtering

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Periodical:

Materials Science Forum (Volumes 433-436)

Edited by:

Peder Bergman and Erik Janzén

Pages:

987-990

DOI:

10.4028/www.scientific.net/MSF.433-436.987

Citation:

T. Seppänen et al., "Growth and Characterization of Epitaxial Wurtzite Al1-xInxN Thin Films Deposited by UHV Reactive Dual DC Magnetron Sputtering", Materials Science Forum, Vols. 433-436, pp. 987-990, 2003

Online since:

September 2003

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