Reaction Bonding of Microstructured Silicon Carbide using Polymer and Silicon Thin Film

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1527-1530

DOI:

10.4028/www.scientific.net/MSF.457-460.1527

Citation:

K. Rajanna et al., "Reaction Bonding of Microstructured Silicon Carbide using Polymer and Silicon Thin Film ", Materials Science Forum, Vols. 457-460, pp. 1527-1530, 2004

Online since:

June 2004

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$38.00

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[3] K. Bhanumurthy and R. Schmid-Fetzer, Materials Science and Engineering A 220 (1996) p.35.

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[5] S. Tanaka, K. Rajanna, T. Abe and M. Esashi, J. Vac. Sci. Technol. B 19 (6), Nov/Dec (2001) p.2173.

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