Young's Modulus and Residual Stress of Polycrystalline 3C-SiC Films Grown by LPCVD and Measured by the Load-Deflection Technique

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1519-1522

DOI:

10.4028/www.scientific.net/MSF.457-460.1519

Citation:

X. A. Fu et al., "Young's Modulus and Residual Stress of Polycrystalline 3C-SiC Films Grown by LPCVD and Measured by the Load-Deflection Technique ", Materials Science Forum, Vols. 457-460, pp. 1519-1522, 2004

Online since:

June 2004

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