Paper Title:
Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates
  Abstract

  Info
Periodical
Materials Science Forum (Volumes 457-460)
Edited by
Roland Madar, Jean Camassel and Elisabeth Blanquet
Pages
1531-1536
DOI
10.4028/www.scientific.net/MSF.457-460.1531
Citation
X.M.H. Huang, X.L. Feng, M.K. Prakash, S. Kumar, C. A. Zorman, M. Mehregany, M.L. Roukes, "Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates", Materials Science Forum, Vols. 457-460, pp. 1531-1536, 2004
Online since
June 2004
Export
Price
$35.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Chupong Pakpum, Nirut Pussadee
Chapter 1: Ceramics, Semiconductors and Composites
Abstract:Silicon-based thermoelectric device fabricated using standard semiconductor manufacturing technique is a promising technology that could lead...
12
Authors: Tian Xiang Dai, Z. Mohammadi, Stephen A.O. Russell, Craig A. Fisher, Michael R. Jennings, Philip A. Mawby
4.2: Etching, Ohmic Contacts and other Processing
Abstract:Trench structure etching is one of the most important processes for the fabrication of 4H-SiC Trench MOSFETs. This paper introduced...
371