Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

1531-1536

Citation:

X.M.H. Huang et al., "Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates", Materials Science Forum, Vols. 457-460, pp. 1531-1536, 2004

Online since:

June 2004

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