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HomeMaterials Science ForumMaterials Science Forum Vols. 457-460Fabrication of Suspended Nanomechanical Structures...

Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates

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Silicon Carbide and Related Materials 2003

Info:

Periodical:

Materials Science Forum (Volumes 457-460)

Pages:

1531-1536

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.457-460.1531

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Online since:

June 2004

Authors:

X.M.H. Huang, X.L. Feng, M.K. Prakash, S. Kumar, Christian A. Zorman, Mehran Mehregany, M.L. Roukes

Keywords:

6H-SiC, Fabrication, Nanomechanical Resonators

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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