Formation of SiC/Si Multilayer Structures on Si(100) by Supersonic Free Jets of Single Gas Source CH3SiH3

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

325-328

DOI:

10.4028/www.scientific.net/MSF.457-460.325

Citation:

Y. Ikoma et al., "Formation of SiC/Si Multilayer Structures on Si(100) by Supersonic Free Jets of Single Gas Source CH3SiH3 ", Materials Science Forum, Vols. 457-460, pp. 325-328, 2004

Online since:

June 2004

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$35.00

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