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HomeMaterials Science ForumMaterials Science Forum Vols. 457-460Formation of SiC/Si Multilayer Structures on...

Formation of SiC/Si Multilayer Structures on Si(100) by Supersonic Free Jets of Single Gas Source CH₃SiH₃

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Silicon Carbide and Related Materials 2003

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Periodical:

Materials Science Forum (Volumes 457-460)

Pages:

325-328

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.457-460.325

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Online since:

June 2004

Authors:

Yoshifumi Ikoma, R. Ohtani, Teruaki Motooka

Keywords:

Hot Filament, Supersonic Free Jet CVD, X-Ray Photoelectron Spectroscopy (XPS), XTEM

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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