Formation of SiC/Si Multilayer Structures on Si(100) by Supersonic Free Jets of Single Gas Source CH3SiH3

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Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

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325-328

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Y. Ikoma et al., "Formation of SiC/Si Multilayer Structures on Si(100) by Supersonic Free Jets of Single Gas Source CH3SiH3 ", Materials Science Forum, Vols. 457-460, pp. 325-328, 2004

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June 2004

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[1] R. F. Davis, G. Kelner, M. Shur, J. W. Palmour and J. A. Edmond: Proc. IEEE Vol. 79 (1991), p.677.

[2] U. Baumann, J. Pezoldt, V. Cimalla, O. Nennewitz, F. Schwierz and D. Schipanski: Institute of Physics Conference Series, No. 142 (Institute of Physics, Bristol, 1996), p.149.

[3] I. Golecki, F. Reidinger and J. Marti: Appl. Phys. Lett. Vol. 60 (1992), p.1703.

[4] E. C. Sanchez and S. J. Sibener: J. Phys. Chem. B Vol. 106 (2002), p.8019.

[5] A. J. Steckl, C. Yuan, J. P. Li and M. J. Loboda: Appl. Phys. Lett. Vol. 63 (1993), p.3347.

[6] K. Takahashi, S. Nishino and J. Saraie: J. Electrochem. Soc. Vol. 139 (1992), p.3565.

[7] Y. Ikoma, T. Endo, F. Watanabe and T. Motooka: Appl. Phys. Lett. Vol. 75 (1999), p.3977.

[8] Y. Ikoma, T. Endo, T. Tada, F. Watanabe and T. Motooka: Mater. Sci. Forum Vol. 338-342 (2000), p.265.

[9] Y. Ikoma, T. Tada, K. Uchiyama, F. Watanabe and T. Motooka: Solid State Phenomena Vol. 78-79 (2001), p.157.

[10] Y. Ikoma, K. Uchiyama, F. Watanabe and T. Motooka: Mater. Sci. Forum Vol. 389-393 (2002), p.751.

[11] Y. Ikoma. T. Endo, F. Watanabe and T. Motooka: Jpn. J. Appl. Phys. Vol. 38 Part 2 (1999).