Effect of Carbonization in Bias-Enhanced Nucleation Step during Highly-Oriented Growth of Diamond Films on 6H-SiC(0001) Substrate

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Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

321-324

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S. H. Seo et al., "Effect of Carbonization in Bias-Enhanced Nucleation Step during Highly-Oriented Growth of Diamond Films on 6H-SiC(0001) Substrate ", Materials Science Forum, Vols. 457-460, pp. 321-324, 2004

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June 2004

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DOI: https://doi.org/10.1063/1.109041

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