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HomeMaterials Science ForumMaterials Science Forum Vols. 457-460Effect of Carbonization in Bias-Enhanced...

Effect of Carbonization in Bias-Enhanced Nucleation Step during Highly-Oriented Growth of Diamond Films on 6H-SiC(0001) Substrate

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Silicon Carbide and Related Materials 2003

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Periodical:

Materials Science Forum (Volumes 457-460)

Pages:

321-324

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.457-460.321

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Online since:

June 2004

Authors:

Soo Hyung Seo, T.H. Lee, J.S. Park, Joon Suk Song, Myung Hwan Oh

Keywords:

6H-SiC, Bias-Enhanced Nucleation, Carbonization, Diamond Film

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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