Low Temperature ECR-PECVD Microcrystalline SiC Growth by Pulsed Gas Flows

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

309-312

Citation:

M.J. Hernández et al., "Low Temperature ECR-PECVD Microcrystalline SiC Growth by Pulsed Gas Flows", Materials Science Forum, Vols. 457-460, pp. 309-312, 2004

Online since:

June 2004

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[4] D.E. Aspnes: Thin Solid Films vol. 89 (1982), pp.249-262 Fig. 5. AFM scan of non-carbonized sample. Detail of a typical surface structure.