Uniform Axial Charge Carrier Concentration in PVT-Grown p-Type 6H SiC by Non-Uniform Distribution of Boron in the Powder Source

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Materials Science Forum (Volumes 457-460)

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719-722

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June 2004

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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[1] M. Bickermann, B.M. Epelbaum, D. Hofmann, T.L. Straubinger, R. Weingärtner and A. Winnacker: J. Crystal Growth Vol. 233 (2001), p.211.

DOI: 10.1016/s0022-0248(01)01579-2

Google Scholar

[2] M. Bickermann, D. Hofmann, T.L. Straubinger, R. Weingärtner and A. Winnacker: Mater. Sci. Forum Vol. 389-393 (2002), p.139.

DOI: 10.4028/www.scientific.net/msf.389-393.139

Google Scholar

[3] D. Hofmann, R. Eckstein, M. Kölbl, Y. Makarov, St.G. Müller, E. Schmitt, A. Winnacker,R. Rupp, R. Stein and J. Völkl: J. Crystal Growth Vol. 174 (1997), p.669.

DOI: 10.1016/s0022-0248(97)00037-7

Google Scholar

[4] R. Weingärtner, P.J. Wellmann, M. Bickermann, D. Hofmann, T.L. Straubinger and A. Winnacker: Appl. Phys. Lett. Vol. 80, No. 1 (2002), p.70.

DOI: 10.1063/1.1430262

Google Scholar

[5] Z.G. Herro, P.J. Wellmann, R. Püsche, M. Hundhausen, L. Ley, M. Maier, P. Masri and A. Winnacker: J. Crystal Growth Vol. 258 (2003), p.261.

DOI: 10.1016/s0022-0248(03)01538-0

Google Scholar

[6] W.C. Mitchel, M. Roth, A.O. Evwarawe, P.W. Yu and S.R. Smith: J. of Electronic Materials Vol. 25 (1996), p.863.

Google Scholar